Description

1. Application
1). Diffuser is a core part of CVD process and the process gas inlet. The key point of performance is deposition uniformity by particle occurrence and gas deposition uniformity in process.
2). Similar function in the dry etcher process of Upper Electrode. The key point of manufacture is tens thousand of hole machining and keeping flatness.

2. Material
Aluminum + Anodizing

3. Specification
1). LCD Generation G3 ~ G8.6 are available.
2). AKT、ULVAC