Description

1. Application
Susceptor is a core part in the CVD process as support glass in TFT-LCD , LED field. It is a key parts to perform the heater such as CVD process temperature to heat 350~400°C increased.

2. Material
Aluminum 6061 + Anodizing 

3. Specification
1). LCD Generation G3 ~ G10 are available.
2). AKT、ULVAC