Equipment

RPS, RPSC repair, overhaul

Description

1. Application
TFT-LCD / TFT-LTPS / OLED / Semiconductor

Thin film transistor liquid crystal display,TFT-LCD
Low Temperature Poly-silicon, LTPS
Organic Light Emitting Diode,OLED

2. Equipment
1). Process used RF Generator (RF Plasma Generator, RFG)
2). Matching box (Matcher)
3). Clean used RPSC (RPS, Remote Plasma Source)
4). Clean used MF Generator, Reactor

3. Brand
1). NPP (New Power Plasma)
2). MKS
3). DAIHEN
4). AE
TOP