Description

1. Application
TFT-LCD / TFT-LTPS / OLED / Semiconductor
Thin film transistor liquid crystal display，TFT-LCD
Low Temperature Poly-silicon, LTPS
Organic Light Emitting Diode，OLED

2. Equipment
1). Process used RF Generator (RF Plasma Generator, RFG)
2). Matching box (Matcher)
3). Clean used RPSC (RPS, Remote Plasma Source)
4). Clean used MF Generator, Reactor

3. Brand
1). NPP (New Power Plasma)
2). MKS
3). DAIHEN
4). AE