科富產品
科富擁有最專業的半導體、面板及電子設備零組件相關產品銷售及技術的經驗
平面顯示器
Diffuser 擴散器
產品簡介
1. Application
1). Diffuser is a core part of CVD process and the process gas inlet. The key point of performance is deposition uniformity by particle occurrence and gas deposition uniformity in process.
2). Similar function in the dry etcher process of Upper Electrode. The key point of manufacture is tens thousand of hole machining and keeping flatness.
2. Material
Aluminum + Anodizing
3. Specification
2). AKT、ULVAC