Equipment

RPS, RPSC repair, overhaul

Description

1. TFT-LCD / LTPS / OLED / Semiconductor
1). RPS RPSC RPG equipment device
2). Repair, Overhaul, Used equipment, New part

2. Equipment
1). Process used RF Generator (RF Plasma Generator, RFG)
2). Matching box (Matcher)
3). Clean used RPSC (RPS, Remote Plasma Source)
4). Clean used MF Generator, Reactor

3. Brand
1). NPP (New Power Plasma)
2). MKS
3). DAIHEN
4). AE
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