Display Components

Diffuser

Materials	Aluminum+Anodizing
Application	Diffuse is a cope parts of CVD process and the process gas inlet. The key point of performance is deposition uniformity by particle occurrence and gas deposition uniformity in prrocess. A similar function in the dry etcher process of Upper Electrode. The key point of manufacture is tens thousand of hole machining and keeping flatness. It is a expendable product that may be reused several times through repair (Re-Anodizing).
Machine	AKT