Features |
Contents |
Specification |
Input
Air
Condition |
Pressure |
5.5kgf/㎠ – 6.5kgf/㎠ |
Temperature |
20℃ |
Filter |
0.5 ~ 1.0㎛ |
Air Consumption |
25ℓ/min |
Cooling
Fluid |
Class |
Water or oil |
Pressure |
3kgf/㎠ |
Cooling Flow Rate |
2ℓ/min |
Temperature |
17 ~ 19℃ |
Motor |
2pole, BLDC, |
Rated Speed Range |
80,000rpm |
Max. Power |
1.5㎾ |
Static Axial Load |
Min 20kgf |
Static Radial Load |
Min 15kgf |
Static Runout |
0.5㎛ |
◈ Use : 12" Wafer Dicing Machines ◈ |
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